SEM_hitachi s4800

扫描电镜,SEM,日立,Hitachi

Loading Procedure for Hitachi 4800

1) login the computer with your active directory passwd, SEM program will start automatically, just leave the blank when prompt for S4800 password

2) Turn on IR lamp and camera

Sample loading

1) Mount your sample to sample holder and check height (make sure it is lower

2) Check the computer monitor to make sure the stage is at EXC (exchange

position), use mouse to select EXC to move the stage to exchange position, and make a note in the log sheet.

3) Press AIR button to vent the load-lock

4) After AIR button stop flashing (indicating vent complete), open the load-lock door (Do Not use the loading stick to open the door to avoid bending)

扫描电镜,SEM,日立,Hitachi

5) Push the loading stick out a little bit and mount your sample holder to the

loading stick. (Do Not touch the loading stick to avoid removing the grease on it)

6) Pull back the loading stick all the way out to avoid it get suck in when start pumping later.

7) Close the load-lock door (Do Not use the loading stick to close the door to avoid bending)

8) Press EVAC to pump the load-lock

9) After EVAC button stop flashing (indicating loadlock pressure is low enough), press OPEN to open the gate valve

10) After OPEN (take a few second, be patient) button stop flashing (indicating gate valve is fully open) push the loading stick in. After the sample holder engaged to the stage, unlock the loading stick and pull back the loading stick all the way out.

11) Press CLOSE to close the gate valve while keeping another hand to hold the loading stick to avoid it from sucking in.

Sample imaging

1 inch

2. click “HOME” position to move the sample to the center

扫描电镜,SEM,日立,Hitachi

3.

4. When asked to flash, please use intensity 1, HV must be off to flash the tip.

1

5. Turn on the HV by clicking “ON”

6. Click “H/L” to go to LM (low magnification) to find the area you need to look at 7. Go back to High Mag after locating the area you need to look at

8. Adjust “focus”, “astigmatism”, “brightness/contrast”, “Mag”

Beam shift Brightness/Contrast

Magnification

Astigmatism Focus

扫描电镜,SEM,日立,Hitachi

9. can be used for automatic brightness contrast control.

choose “Slow3” icon for slow scan image capture 10.

11.

capture.

12. PCI software can be use for image analysis.

Sample unloading

1) Turn off High voltage from the computer

2) Move the stage back to EXC (exchange position) by using mouse to select EXC

3) press OPEN to open the gate valve

4) After OPEN button stop flashing (indicating gate valve is fully open) push the loading stick in. After the sample holder engaged to the loading stick, lock the loading stick to sample holder and pull back the loading stick all the way out.

5) Press CLOSE to close the gate valve.

6) After CLOSE button stop flashing (indicating gate valve is fully close), press

AIR button to vent the load-lock.

7) After AIR button stop flashing (indicating vent complete), open the load-lock door (Do Not use the loading stick to open the door to avoid bending)

8) Remove the sample holder from the loading stick

扫描电镜,SEM,日立,Hitachi

9) Close the load-lock door (Do Not use the loading stick to close the door to avoid bending)

10) Press EVAC to pump the load-lock

Access SEM image over network

1.

2.

3.

4.

5.

6.

7. Right click “My computer” Select “Map Network Drive” Choose any unused Drive letter Enter for folder when enter your login name, you may need to put uofi\ before your netid uncheck Reconnect at logon Click “Finish”